반도체용 Precursor
(반도체용 전구체)독자적인 유기금속 화합물 설계 및 제조기술을 바탕으로 고객사에 적극 대응하고 있으며,
CVD/ALD 전구체를 제조 국내외 업체에 공급하고 있습니다.
SEMICONDUCTOR
No | Product | Chemical Name |
---|---|---|
1 | TMA | Trimethylaluminium |
2 | TMG | Trimethylgallium |
3 | Gal3 | Gallium(III) iodide |
4 | GaCl3 | Gallium(III) chloride |
5 | TMI | Trimethylindium |
6 | InCl3 | Indium(III) chloride |
7 | Cp2Mg | Bis(cyclopentadienyl) magnesium |
8 | (EtCp)2Mg | Bis(ethylcyclopentadienyl) magnesium |
9 | TESb | Triethylantimony |
10 | Sb2O3 | Antimony(III) oxide |
11 | TBP | tert-butylphosphine |
12 | TiCl4 | Titanium tetrachloride |
13 | PDMAT | Pentakis(dimethylamino) tantalum |
14 | W(CO)6 | Tungsten hexacarbonyl |
15 | TDMAHf | Tetrakis(dimethylamino) hafnium |
16 | CpZr | Cyclopentadienyl(tris-dimethylamino)zirconium |
17 | TDMAZr | Tetrakis(dimethylamido) zirconium |
18 | Teos | Tetraethylorthosilicate |
19 | TCS | Trichlorosilane |
20 | TrisDMAS | Tris(dimethylamino) silane |
21 | BTBAS | Bis(tertiarybutyl) aminosilane |
22 | DIPAS | Diisopropylaminosilane |
23 | DIPAS | Diisopropylaminosilane |
24 | BEMAS | Bis(ethylmethylamino)silane |
25 | CCTBA | Dicobalt hexacarbonyl tertiary-butyl acetylene |
26 | IBGe | iso-butylgermane |
27 | TDMAGe | Tetrakis(dimethylamino) germane |
28 | TEG | Triethylgallium |
29 | TBA | tert-butylarsine |
30 | DADI | (3-Dimethylaminopropyl) dimethylindium |
31 | DEZ | Diethylzinc |
32 | CpHf | Cyclopentadienyl (tris-dimethylamino) hafnium |
33 | TEMAZr | Tetrakis(ethylmethylamido) zirconium |
34 | TEMAHf | Tetrakis (ethylmethylamido) hafnium |
35 | OMCTS | Octamethylcyclotetra-siloxane |
36 | 4MS | Tetramethylsilane |
37 | HfCl4 | Hafnium tetrachloride |
38 | TBIDMW | Bis(tert-butylimino) bis(dimethylamino) tungsten |
39 | TDMASn | Tetrakis(dimethylamino)tin(IV) |
40 | TDMAGa | Tris(dimetylamino)gallium(III) |
41 | D2O | Deuterium Oxide |
42 | ZrCl4 | Zirconium Tetrachloride |
43 | InI3 | Indium(III) iodide |
44 | DMAC | Dimethylaluminium chloride |
45 | DMAi | Dimethylaluminum isopropoxide |
46 | TDMATi | Tetrakis (dimethylamino) titanium(IV) |
47 | Borazine | Triazatriborinane |
48 | 1-Hexene | 1-Hexene |
49 | Octane | n-Octane |
50 | ECH | Ethylcyclohexane |
0 | ||
제품문의 | Ru 계열 | 구매 의뢰하기 |
제품문의 | Sn 계열 | 구매 의뢰하기 |
제품문의 | Mo 계열 | 구매 의뢰하기 |