반도체 소재

GLOBAL SPECIALTY CHEMICAL PROVIDER

반도체 소재

(주)레이크머티리얼즈는 특화된 기술력과 차별화된 제품으로
유기금속소재 화학업체들과 경쟁 우위를 목표로 고객에게 최고의 만족과 가치를 추구하고 있으며
전자재료 사업과 정밀화학소재 사업을 통해 최적화된 화학소재 TOTAL 솔루션을 제공하고 있습니다.

반도체용 Precursor

(반도체용 전구체)

독자적인 유기금속 화합물 설계 및 제조기술을 바탕으로 고객사에 적극 대응하고 있으며,
CVD/ALD 전구체를 제조 국내외 업체에 공급하고 있습니다.

SEMICONDUCTOR
No Product Chemical Name
1 TMA Trimethylaluminium
2 TMG Trimethylgallium
3 Gal3 Gallium(III) iodide
4 GaCl3 Gallium(III) chloride
5 TMI Trimethylindium
6 InCl3 Indium(III) chloride
7 Cp2Mg Bis(cyclopentadienyl) magnesium
8 (EtCp)2Mg Bis(ethylcyclopentadienyl) magnesium
9 TESb Triethylantimony
10 Sb2O3 Antimony(III) oxide
11 TBP tert-butylphosphine
12 TiCl4 Titanium tetrachloride
13 PDMAT Pentakis(dimethylamino) tantalum
14 W(CO)6 Tungsten hexacarbonyl
15 TDMAHf Tetrakis(dimethylamino) hafnium
16 CpZr Cyclopentadienyl(tris-dimethylamino)zirconium
17 TDMAZr Tetrakis(dimethylamido) zirconium
18 Teos Tetraethylorthosilicate
19 TCS Trichlorosilane
20 TrisDMAS Tris(dimethylamino) silane
21 BTBAS Bis(tertiarybutyl) aminosilane
22 DIPAS Diisopropylaminosilane
23 DIPAS Diisopropylaminosilane
24 BEMAS Bis(ethylmethylamino)silane
25 CCTBA Dicobalt hexacarbonyl tertiary-butyl acetylene
26 IBGe iso-butylgermane
27 TDMAGe Tetrakis(dimethylamino) germane
28 TEG Triethylgallium
29 TBA tert-butylarsine
30 DADI (3-Dimethylaminopropyl) dimethylindium
31 DEZ Diethylzinc
32 CpHf Cyclopentadienyl (tris-dimethylamino) hafnium
33 TEMAZr Tetrakis(ethylmethylamido) zirconium
34 TEMAHf Tetrakis (ethylmethylamido) hafnium
35 OMCTS Octamethylcyclotetra-siloxane
36 4MS Tetramethylsilane
37 HfCl4 Hafnium tetrachloride
38 TBIDMW Bis(tert-butylimino) bis(dimethylamino) tungsten
39 TDMASn Tetrakis(dimethylamino)tin(IV)
40 TDMAGa Tris(dimetylamino)gallium(III)
41 D2O Deuterium Oxide
42 ZrCl4 Zirconium Tetrachloride
43 InI3 Indium(III) iodide
44 DMAC Dimethylaluminium chloride
45 DMAi Dimethylaluminum isopropoxide
46 TDMATi Tetrakis (dimethylamino) titanium(IV)
47 Borazine Triazatriborinane
48 1-Hexene 1-Hexene
49 Octane n-Octane
50 ECH Ethylcyclohexane
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